Abstract
A scanning electron microscope with a field-emitting electron gun, digitally controlled scanning and a concentric hemispherical energy analyser is described and compared with different types of energy dispersive scanning electron microscopes. The advantages of hemispherical analysers accessed by electrostatic lenses are flexible electron optical control of working distances and resolving power. A 4 element lens is described which results in an analyser with a 2 eV window over an energy range of 20 eV to 800 eV. Auger images of calcium and sulphur on titanium are given. Spatial resolutions of 50 nm and frame scan times of a few minutes are possible.
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Schedule a callMore From: Proceedings of the Royal Society of London. A. Mathematical and Physical Sciences
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