A digital output MEMS DRG on-chip temperature compensation method based on virtual sensor

Abstract

A digital output Disk Resonator Gyroscope (DRG) on-chip temperature compensation method based on virtual sensor is proposed in this paper. DRG is a combination of solid wave gyroscope and MEMS gyroscope, it has become the research emphasis of high precision gyroscope. In practical application, the ambient temperature changing will cause several problems such as the change of scale factor, zero drift and so on. To increase the environmental adaptability of DRG, the DRG temperature characteristics are analyzed, the temperature compensation models of scale factor and zero output are established in this paper. The concept of virtual temperature sensor is introduced to solve the lead or lag problem caused by integrated temperature sensor. Based on the trend of AC drive amplitude changing with temperature, the temperature measurement is converted into AC voltage amplitude measurement. The virtual temperature sensor is used to complete the on-chip temperature compensation of the DRG angular velocity output, the second-order compensation realizes the scale factor change of 40 ppm/[Formula: see text]C and zero output change of 27[Formula: see text]/h over the full temperature range varying from [Formula: see text] to 60[Formula: see text]C according to the simulation result.