Abstract
A digital excitation-calibration technique of dual-mass MEMS gyroscope for closed-loop mode-matching control is presented in this paper. The technique, which takes advantage of the symmetrical amplitude response of MEMS gyroscope, exploits a two-side excitation signal to actuate the sense mode to obtain the corresponding DC tuning voltage. The structural characteristics of dual-mass decoupled MEMS gyroscope and the tuning principle of excitation-calibration technique are introduced firstly. Then, the scheme of digital excitation-calibration system for the real-time mode-matching control is presented. Simultaneously, open-loop analysis and closed-loop analysis are deduced, respectively, to analyze the sources of tuning error and system stability. To verify the validity of the scheme and theoretical analysis, the system model was established by SIMULINK. The simulation results are proved to be consistent with the theoretical analysis, verifying the feasibility of the digital excitation-calibration technique. The control algorithms of the system were implemented with a FPGA device. Experimental results demonstrate that digital excitation-calibration technique can realize mode-matching within 1 s. The prototype with real-time mode-matching control has a bias instability of 0.813/h and an ARW (Angular Random Walk) of 0.0117/. Compared to the mode-mismatching condition, the bias instability and ARW are improved by 3.25 and 4.49 times respectively.
Highlights
The Micro-electromechanical System (MEMS) gyroscope is a kind of miniature inertial sensors which is capable of measuring angular rate
This paper provides a digital excitation-calibration technique of dual-mass MEMS gyroscope for closed-loop mode-matching control
Analytical results reveal that frequency split between the two-side excitation signal and drive signal has a significant influence on the tuning accuracy due to the asymmetry of the sense-mode dynamics
Summary
The Micro-electromechanical System (MEMS) gyroscope is a kind of miniature inertial sensors which is capable of measuring angular rate. It utilizes electrostatic negative stiffness effect to alter the equivalent stiffness of the sense mode by applying an adjustable DC voltage to the frequency tuning electrodes of MEMS gyroscope [19,20]. The phase-domain approach in [23,24] uses the drive signal to actuate sense mode and employs phase-locked loop (PLL) to measure the phase difference between operating modes, thereby recognizing the mode-matching state This method will enhance the difficulty of Coriolis signal detection. Observation of noise power difference between two bands located around drive-mode resonance frequency for mode-match determination is reported in [28] This frequency tuning principle resembles to the frequency calibration circuit above, but the ambient noise needs to be strictly controlled to improve the matching accuracy.
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