Abstract

A differential resonant voltage sensor with frequency output was developed by bonding two quartz crystal double-ended tuning forks (DETFs) on both sides of a piezo bimorph. The applied voltage induced tensile and compression deformation in the upper and bottom layers of the piezo bimorph, which caused the resonant frequency of the dual DETFs to increase and decrease, respectively. In this case, the differential output of the resonance frequencies of the dual DETFs greatly reduced the effect of temperature drift. In addition, the input resistance of the piezo bimorph reached a few hundred GΩ, which caused almost no influence on the DC voltage under test. The fabricated device showed a linear characteristic over its measurement range of ±700 V with a sensitivity of 0.75 Hz/V, a resolution of 0.007% (0.1 V) and hysteresis of 0.76% of the full range. The quality factor of the DETFs was about 3661 (in air). This novel resonant voltage sensor with its extremely low power consumption is promising for measuring or monitoring DC voltage in various fields.

Highlights

  • Voltage/electric field sensors are widely used in a variety of applications such as power grids [1], Internet of Things (IoT) [2], oil well health monitoring [3], and even smart houses [4]

  • This paper reports on a differential resonant voltage sensor using a piezo bimorph as a voltage transducer and two differential quartz crystal double-ended tuning forks (DETFs) as force sensors

  • The schematic diagram of the differential voltage sensor is shown in Figure 1, including a piezo bimorph, dual DETFs and four quartz crystal spacers

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Summary

Introduction

Voltage/electric field sensors are widely used in a variety of applications such as power grids [1], Internet of Things (IoT) [2], oil well health monitoring [3], and even smart houses [4]. Traditional voltage measuring devices include resistance voltage dividers, capacitive voltage dividers, and electromagnetic voltage transformers. Capacitive dividers and electromagnetic voltage transformers are usually used for AC voltage measurement. The past few decades has witnessed the development of many novel DC/AC voltage sensors such as the optical voltage sensors (OVSs) based on a linear electro-optic effect (Pockels effect) [6], and Kerr effect [7]. The voltage sensors using piezoelectric material (Pb(Zr1−x Tix )O3 , PZT) as a voltage transducer and a fiber Bragg grating as a strain sensor have been developed [8]. The voltage sensors employ electro-optical crystal or piezoelectric material and feature high input resistance of a few hundred

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