Abstract
This paper reports the theoretical and experimental characterization of a new z-axis silicon resonant micro accelerometer fabricated by the THELMA© surface micromachining technique, characterized by differential sensing and very small dimensions. The working principle of this device is based on the variation of the electrostatic stiffness of two torsional resonators. This work is a prosecution of the research on resonant accelerometers published in [1,2].
Full Text 
Sign-in/Register to access full text options
Sign-in/Register to access full text options 
Paper version not known
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
