Abstract

A differential interferometric heterodyne encoder with spatially separated input beams was developed to minimize periodic nonlinearities resulting from polarization mixing. The laser beams with different frequencies were delivered by two polarization-maintaining fibers to the encoder head. Under laboratory conditions this encoder demonstrated a system stability of 38pm (standard deviation) and 100pm over 30s and 1h respectively. In a comparison measurement with a differential heterodyne interferometer, this encoder showed periodic nonlinearities of less than 30pm without any additional correction.

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