Abstract

The manuscript proposes a novel dielectric modulated FET biosensor for the detection of SARS-CoV-2 in terms of spike, envelope and DNA proteins of the virus. The models used in a simulation and the transfer characteristic of the proposed sensor both are first calibrated with the fabricated FET sensor. Than the modification of low workfunction Hf Gate2 (dual metal control gate) has been proposed in the manuscript. The extended Hf Gate2 provides more space for immobilization of the virus proteins and utilize the advantages of charge plasma formation and electrical doping. In the manuscript, sensitivity of the proposed sensor has been investigated by DC and RF parameters in terms of virus proteins and their charge densities. In addition, a comparative analysis of the proposed sensor with and without Hf Gate2 has been examined in terms of DC/RF parameters that reveal a significance of the proposed modification. Moreover, the Impact of replacement of SiO <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> insulating layer by HfO <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> has also been studied over the sensing ability of sensor in the context of DC/RF components.

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