A Developed Non-Contact Active Vibration Isolation Unit for Precision Machining Systems

Abstract

Vibration isolation has been widely used for precision machining systems to reduce vibration errors caused by disturbance. In general, vibration isolation units have mechanical contact points between a base and a table, while ground vibration passes through these contact points. This paper presents a newly developed non-contact type active vibration isolation unit which consists of an air spring, a voice coil motor, and an aerostatic bearing. The developed unit also has an active vibration control function to reduce an influence of direct disturbance force. Vibration isolation experiments confirm that the resonances in ground vibration transmission and direct disturbance transmission can be reduced and the influence of ground vibration can be decreased.