Abstract
In this report, a design method is proposed for in-plane MEMS electrostatic energy harvesters with comb drives. Dependent on the device layer thickness and the achievable aspect ratio of the DRIE process, either the overlapping-area-change or the gap-closing converter has higher output power than the other. Two prototypes of MEMS electret energy harvesters are developed to verify the present design method.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.