A Degradation Preventing Method for the Organic Material in Gas Sensing Application by Using CMOS Submicron Wire Sensor

Abstract

In this study, we propose a degradation preventing sensing method for organic material in gas sensing application on polysilicon submicron wire (poly-Si SW) charge sensor chip. The poly-Si SW chip was fabricated by 0.35 μm two-polysilicon-four-metals (2P4 M) CMOS technology. The degradation of polymer material was reduced through the charge sensing mechanism. Compared with traditional sensing methods, there is no current flow through polymer based sensing film. Moreover, the lifetime, response variation and durability performance of sensor were improved. Based on CMOS technology, our poly-Si SW can be easily integrated with another system, i.e., wireless and microfluidic system. Therefore, this work also presents a good potential of poly-Si SW sensor chip to accomplish the goal of integrated multi-sensor in one low power consumption chip. This demonstration successfully shows organic sensing materials to accomplish the need in Internet of Things (IoT) applications