Abstract
The aluminum line overetched defect might be called as undercut、PR Hole, etc by different manufacturers. The defect of this case study mainly shows a hole found on the aluminum line after stripper process but there is no any tracable symptom before the ending of dry etch process. That is, it seems no means to prevent or to found the root cause.A defect defense approach via cleanroom air quality database based integrated with TFT manufacturing processes、air sampling、characteristics of manufacturing chemicals、cleanroom circulation and air flow pattern is proposed to demostrate how to figure out the root cause of aluminum line overetched defect, which found after stripper.Via the aid of proposed approach, the analysis shows the defect arises from the cross contamination between photo、PVD and stripper process and the cross contamination comes from manufacturing layout、cleanroom circulation and air flow pattern.
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