A decoupling calculation method of separating temperature component from the nano-scale metal film thickness measurement output by the eddy current sensor

Abstract

The eddy current method has been widely applied in the field of nano-scale metal film thickness detection. The output signal of an eddy current sensor is generally tiny in practice, and it is easily affected by the ambient temperature variation, which results in a decrease in the measurement accuracy. How to separate the temperature effect on film thickness measurement for achieving a high precision is a major problem. Therefore, a coupling model of an eddy current sensor with an electromagnetic field and a temperature field is established in this study, and the influence of the film thickness and temperature on coil impedance is calculated. It is found that the inductance and resistance of the coil vary monotonically as thickness and temperature with a measure of linearity in a certain range, as well as the real part and imaginary part of the output voltage by using an AC bridge. Then a film thickness-temperature decoupling calculation method is proposed, and a group of linear calibration intervals are further divided considering the linearity and measurement accuracy. According to the calculation results, it is confirmed that the method can decouple the two, and accomplish a higher accuracy. In addition, the method is verified by a series of experiments, and the variation trend of real and imaginary parts of output voltage with thickness and temperature is consistent with simulation results. At the same time, it is feasible to realize a synchronous detection of metal film thickness and ambient temperature in a certain range.