Abstract

We report a novel electrostatic comb actuator for linear motion output by electrostatically induced self-vibration under a direct-current (DC) power supply. The comb actuator contains 4 pairs of electrodes and has a total mass of 60 mg. It can achieve output displacement with amplitude range from 0.9 mm to 1.4 mm at a vibration frequency of about 220 Hz. The power density can reach 32.04 W/kg, which is 4 times of the previous actuators with a single-pair of electrodes. The comb actuator could open up new directions for electrostatic force utilization in millimeter scale.

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