Abstract
A complete database for Poiseuille flow rate is advanced by solving the linearized Boltzmann equation numerically. The effects of surface accommodation coefficients, α1 and α 2, and inverse Knudsen number, D, on the Poiseuille flow rate are considered. The present database extends existing published results from 0.7≤α1α2≤1.0 to 0.1≤α1 α2≤1.0. It can be easily implemented in the modified molecular gas film lubrication (MMGL) equation, which governs ultra‐thin gas film lubrication problems. In addition, the database for low accommodation coefficients is valuable in the analysis and application of MEMS devices and their further development. The characteristics of squeeze film damping are utilized as examples to illustrate the implementation of the present database to the linearized MMGL equation with effects of gas rarefaction and non‐symmetric molecular interaction taken into account. The reaction forces, which include spring forces and damping forces, and the cutoff squeeze number of a squeeze film for a micro‐accelerometer are derived analytically and discussed.
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