A data acquisition and display system for spin-polarized scanning electron microscopy (spin SEM)

Abstract

A new data-acquisition and display system has been developed for magnetic domain observation using spin-polarized scanning electron microscopy. The system is composed of 32 frame memories (512×512×16 bit), an image processor with two high-speed digital signal processors, and a 1280×1024 pixel color monitor. It has the following capabilities: electron probe scanning control; high-speed (21 s/512×512 pixel image) computing and recording of two components (Px, Py) of secondary-electron spin polarization; computing and displaying the averaged Px and Py obtained with repetitive scanning; domain image formation for an arbitrary component from (Px,Py) data (8 s/512×512 pixel image); variable speed scanning to obtain a homogeneous quality image in minimum time, even when secondary-electron intensity varies due to surface inclination; two-dimensional display of polarization vector distribution; and angle image of the magnetization direction in both black and white and color representation.