Abstract

A novel model is presented for estimation of the secondary electron intensity distribution in linewidth measurements using scanning electron microscopes (SEMS). A cylindrical envelope projection model is proposed for both steep and gentle slants, such that the secondary electron emission area is defined by the surface included by a cylindrical volume rather than the spheroids of conventional models. Predictions from the model have been experimentally verified and the model may be confidently used for the measurement of topological specimen features.

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