Abstract
A miniature ultrasonic motor using first-order bending vibration of a cylinder with two free-free ends has been developed in this investigation. It is based on Pb(Mg1/3Nb2/3) O3-PbTiO3 crystal with high piezoelectric response. The stator of the motor is optimized by finite element method. The stator is 4.8 mm in diameter and 18 mm in length. The nonlinear characteristics of the stator are discussed in this study and a fitted formula is given. The resonant frequency and mechanical quality factor of the stator decrease with voltage. The main performance of the motor is measured. The rotation speed reaches 450 r/m, with a maximal torque of 0.6 mNm. The motor can run with low voltage.
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