Abstract

We present an H-shaped resonator made of two clamped–clamped microbeams mechanically coupled at the middle with a strong coupler to achieve, in a single device, mechanical amplification of the response signal, filtering, and frequency conversion simultaneously. Usingmechanicalamplification combinedwith combination resonances generated from a mixed-frequency excitation, a wideband tunable filter, and a simultaneous frequency up and down convertors at multiple bands is demonstrated. The proposed coupled structure, when combined with the easy-to-implement technique of frequency mixing, is promising for applications in an RF chain.

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