Abstract

Based on the approximated solution of Poisson's equation, we propose a continuous current model of ultra-thin fully depleted cylindrical surrounding-gate Si nanowire MOSFETs. It matches well with three-dimensional simulation results using SILVACO Atlas TCAD in a wide range (from intrinsic to high doping) of the body doping concentration without any empirical fitting parameters. It is valid for all the operation regions such as subthreshold, turn-on, linear and saturation.

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