A confocal measurement method for surface profile variations and shell thickness uniformity of hemispherical shell resonator

Abstract

Here we present a confocal measurement method for the precise measurements of variations in the inner and outer surface profiles (IOSPs) and shell thickness uniformity (STU) of the hemispherical shell resonator (HSR). In this method, the unilateral-shift-subtracting confocal technique is applied to determine the focus of the sensor on the IOSPs of the HSR. The normal tracking technique is employed for measuring the outer surface, while the normal direction of the outer surface serves as the reference for measuring the inner surface, thereby enhancing the accuracy of relative position measurements for the HSR. Furthermore, we applied a trajectory-prediction method to narrow down the scanning range of the confocal sensor, which significantly improved the measurement efficiency. The experimental results showed that the repeated accuracies of the proposed methods are better than 40 nm for IOSP variations measurement and better than 50 nm for HSR STU measurement.