A COMSOL novel micromirror matrix model for digital image display

Abstract

Digital micromirror devices (DMD) have gained significant attention in various scientific and industrial domains due to their potential for spatial light and laser modulation. However existing micromirrors designs often face limitations in terms of rotation angles, voltage consumption, and stability time for some type of applications. In this paper, we address these issues by exploring micromirror structure materials, more precisely, the materials for the torsion bar. To achieve this, we have used COMSOL Multiphysics knowing to provide accurate predictive simulation results, to design a micromirror model incorporating three inclination modes: unidirectional, bidirectional, and a user-defined free mode. Through extensive simulations, we have compared different materials for the torsion bar of the micromirror and have evaluated their performance in terms of voltage consumption, stability time, rotation angles and electric energy consumption. Aluminum 3008-H18 emerged as the optimal choice, exhibiting a stability time of 40 μs and achieving a maximum tilt of 12.75 degrees. The micromirror system has demonstrated stable position within the voltage range (from 0 volts to 27 volts) and maximum electric energy consumption of 7.72 × 10−8 μJ. Our micromirror design features a 10 × 10 μm reflective element capable of achieving a maximum inclination of ±12.75 degrees. To enhance the capabilities of the micromirror, an 8 × 8 micromirror matrix has been developed, enabling collective and coordinated movements of individual micromirrors. Also, a process for translating digital images into micromirror states has been devised, enabling accurate image display on the matrix. Simulation results demonstrate the effectiveness of the micromirror matrix design and the image processing script, images displayed on the micromirror matrix exhibit high accuracy, faithfully reproducing desired patterns in the primary images. Overall, our proposed micromirror model and micromirror matrix model offer enhanced performance, versatility, and accuracy, enabling a diverse array of simulations across scientific research and industrial domains.