A computing model of ion energy distributions for dual frequencies capacitive couple discharges

Abstract

We have developed an analytical dual-frequency model, which results in accurate dual-peaks of the ion energy distributions (IEDs) for the given control parameters. The model can analytically calculate and predict the IEDs dual peaks and energy width with necessary plasma parameters. This model can also predict the IEDs from dual frequencies’ drives at any voltage, the associated results are compared with particle-in-cell (PIC) simulations. The IED at a surface is an important parameter for processing in dual radio frequencies driven capacitive couple discharges. The computing model is developed for the IED in a low pressure discharge based on a linear transfer function that relates the time-varying sheath voltage to the time- varying ion energy response at the surface. This model is in good agreement with PIC simulations over a wide range of dual frequencies driven capacitive couple discharge excitations.