A computer simulation for mask-shape effect in the fabrication of an aspheric micro lens array by using a dragging process with excimer laser

Abstract

This investigation studies a computer simulation of the mask-shape effect in the fabrication of an aspheric micro lens array using a dragging process with excimer laser. A laser dragging process with variously shaped masks can be used to manufacture a micro structural array with a curved surface. Generally, a semi-circular mask is used in the dragging to produce a micro lens array. However, the axial symmetry of a single micro lens is not good. The unsatisfactory axial symmetry limits the use of dragging in strict optical applications.Variously shaped masks were computer simulated to solve this problem. The results demonstrate that the parabolic-shaped mask can generate excellent axial symmetry. This improved process combines the advantage of the good axial symmetry with a high fill-factor in fabricating the aspheric micro lens array.