Abstract
This study presented an overview of current developments in optical micro-electromechanical systems in biomedical applications. Optical micro-electromechanical system (MEMS) is a particular class of MEMS technology. It combines micro-optics, mechanical elements, and electronics, called the micro-opto electromechanical system (MOEMS). Optical MEMS comprises sensing and influencing optical signals on micron-level by incorporating mechanical, electrical, and optical systems. Optical MEMS devices are widely used in inertial navigation, accelerometers, gyroscope application, and many industrial and biomedical applications. Due to its miniaturised size, insensitivity to electromagnetic interference, affordability, and lightweight characteristic, it can be easily integrated into the human body with a suitable design. This study presented a comprehensive review of 140 research articles published on photonic MEMS in biomedical applications that used the qualitative method to find the recent advancement, challenges, and issues. The paper also identified the critical success factors applied to design the optimum photonic MEMS devices in biomedical applications. With the systematic literature review approach, the results showed that the key design factors could significantly impact design, application, and future scope of work. The literature of this paper suggested that due to the flexibility, accuracy, design factors efficiency of the Fibre Bragg Grating (FBG) sensors, the demand has been increasing for various photonic devices. Except for FBG sensing devices, other sensing systems such as optical ring resonator, Mach-Zehnder interferometer (MZI), and photonic crystals are used, which still show experimental stages in the application of biosensing. Due to the requirement of sophisticated fabrication facilities and integrated systems, it is a tough choice to consider the other photonic system. Miniaturisation of complete FBG device for biomedical applications is the future scope of work. Even though there is a lot of experimental work considered with an FBG sensing system, commercialisation of the final FBG device for a specific application has not been seen noticeable progress in the past.
Highlights
Micro-opto electromechanical system or optical microelectromechanical system combines optical components with micro electromechanical system technology
To assist clinicians in knowing about the recent developments under optical microelectromechanical system (MEMS), a clear possible visualisation was provided to implement the same technologies in the biomedical field
This paper has investigated the necessary information about optical MEMS, and its possible applications in the biomedical field have been assembled and discussed in detail
Summary
Micro-opto electromechanical system or optical microelectromechanical system combines optical components with micro electromechanical system technology. Electronic devices size varies from millimetre, micrometre, to nanometre, but mechanical element size ranges from four to five times the electronic devices This requires sophisticated fabrication technology for optical MEMS. Functionality testing of optical and electronic structures is the first phase of MOEMS device fabrication In this context, the development and analysis of a mechanical element is the second phase of MOEMS device advancement. Electromechanical design involves various mechanical factors such as stiffness, material parameter, electrostatic, and thermal. Different factors that need to be considered during the design of optical MEMS are mechanical, electrical, thermal, ecological, biological, optical, and chemical aspects based on different applications. This analysis aimed to research the literature on photonic MEMS in biomedical systems. RQ1: “What are the major issues regarding using photonic MEMS?” RQ2: “What key success factors are applied to methods that influence performance enhancement?” RQ3: “What are the research gap and scope to design the optimum photonic MEMS devices in the biomedical application?”
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