A comprehensive review of micro-grinding: emphasis on toolings, performance analysis, modeling techniques, and future research directions

Abstract

Micro-grinding is a tool based mechanical micromachining process which is mostly applied to create and finish 3D micro-features on hard and brittle materials such as glass, silicon, alumina, etc. Miniature-sized abrasive tool comes in physical contact with the workpiece and removes the unwanted material with mostly nanometric undeformed chip thickness and hence can achieve ductile mode cutting. Electroplated and metal bonded sintered abrasive tools are the most researched micro-grinding tools in terms of their fabrication techniques evolution, design modification, and processing of different materials. In the last decade, researchers have thoroughly investigated the micro-grinding process mechanics and identified different issues along with controlling strategies to improve the process performance. Through experimental and analytical studies, it was shown that process performance could be improved through proper tool modifications, optimum selection of process parameters, proper lubrication media, and most importantly by the development of dedicated machine tools. This paper describes the micro-grinding process mechanism considering tool-workpiece interaction. Thereafter, a comprehensive review on micro-grinding tool manufacturing technologies, issues and controlling strategies, proper machining parameter selection, modeling techniques, and micro-feature generation in various materials is presented. After critical examination of the state of the art of this process, challenges, and limitations in the process establishment and applications are derived. Future research scopes in different aspects of the said process are suggested so as to multiply the process utility.