Abstract
A study is presented of a dynamic capacitive sensor configuration that is intended to impose minimal force and resistance to motion on the moving electrode. The aim is to enable the use of moving electrodes having arbitrary levels of compliance without suffering the adverse effects of large bias voltages such as pull-in instability. This configuration would facilitate the incorporation of highly compliant and thin electrode materials that present the least possible resistance to motion. This type of material is particularly useful for sensing sound. Measured results show that for the highly compliant acoustic sensor design examined here, a large bias voltage of 400 volts can be applied without influencing its motion. The electrical sensitivity to sound is found to be approximately 0.5 V/pascal, two orders of magnitude greater than typical acoustic sensors.
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