Abstract
Planar waveguide lenses are key elements of optical integrated circuits (OIC) widely applied in signal processing, and in optical communication systems. The computative design program allows to optimize lens-shape for best focusing performances. Design can be carried out also for anisotropic waveguide materials e.g. LiNbO 3. Optimized lens-shape is encoded directly for electron-beam writing system based on a scanning electron microscope (JEOL 840 A) equipped with external lithographic beam control (ELPHY, Raith GmbH). By means of the system proton-exchanged lenses embedded in titanium-doped LiNbO 3 waveguides were developed. These lenses could have near diffraction limited focus spots in relatively field angles (> ±1°)..
Sign-in/Register to access full text options 
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
