Abstract
A complete model for energy-dispersive X-ray fluorescence based on the Inverse Monte Carlo (IMC) method is obtained. The model accounts for primary, secondary, and tertiary X-rays excited by unscattered, single, and double scattered source photons. The elemental X-ray intensities are derived as functions of the difference in the elemental weight fractions between the unknown sample and a given reference sample to form a set of nonlinear equations. The coefficients of these equations are obtained from a Monte Carlo simulation in the reference sample and the system of equations is numerically solved for the unknown sample composition. The IMC model has been investigated for a radioisotope source excited EDXRF system consisting of a 109Cd source and a Si(Li) detector for a CuNi alloy sample (CDA Alloy 715) and a stainless steel sample (304 Stainless Steel) in addition to several other simulated cases. The results show that the IMC model is valid, accurate, and computationally efficient. The accuracy of the solution is found to be directly related to the accuracy with which the elemental intensities are known. On the average, the model takes about 5 min on a high speed personal computer to yield a relative error in the elemental weight fractions of about 3%.
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