A comparison of theoretical and experimental L and M cross sections

Abstract

Quantitative microanalysis using the EELS technique requires the knowledge of partial scattering cross sections to relate the measured edge intensities to the concentrations in the compounds. Experimental data are now available not only for L 2, 3 edges, but also for M 4, 5 edges, and can be used to test the quantification procedure by comparison of cross section ratios with calculations derived from a Hartree-Slater model. The deviations between theory and experiment range from about 5% in the case of S, Ca, La and Gd to about 50% for Cu, Zn and Ho to Yb.