Abstract
This paper describes a comparison of the mechanical structures (a double-sided beam and a cantilever beam) of a probe in a tool edge profiler for the measurement of a micro-cutting tool. The tool edge profiler consists of a positioning unit having a pair of one-axis DC servo motor stages and a probe unit having a laser displacement sensor and a probe composed of a stylus and a mechanical beam; on-machine measurement of a tool cutting edge can be conducted with a low contact force through measuring the deformation of the probe by the laser displacement sensor while monitoring the tool position. Meanwhile, the mechanical structure of the probe could affect the performance of measurement of the edge profile of a precision cutting tool. In this paper, the measurement principle of the tool edge profile is firstly introduced; after that, slopes and a top-flat of a cutting tool sample are measured by using a cantilever-type probe and a double-sided beam-type probe, respectively. The measurement performances of the two probes are compared through experiments and theoretical measurement uncertainty analysis.
Highlights
The importance of precision cutting tools having a micro-cutting edge tends to be more significant in many industrial fields, such as the semiconductor industry and energy engineering, with the increase in the demand for higher cutting quality and lower manufacturing costs in mass production [1,2]
These results demonstrated that the profiler could achieve better stability with the double-sided beam in the profile measurement
Two types of probes with a cantilever beam and a double-sided beam designed for a tool edge profiler for on-machine measurement of a precision cutting tool have been presented and compared in aspects of measurement principle, construction, and measurement capability
Summary
The importance of precision cutting tools having a micro-cutting edge tends to be more significant in many industrial fields, such as the semiconductor industry and energy engineering, with the increase in the demand for higher cutting quality and lower manufacturing costs in mass production [1,2]. Some of the traditional probe-based measuring instruments, such as a roughness tester, are designed to have a low contact force to avoid damage to a workpiece surface in the measurement process. For the profile measurement of the cutting tool edge, the AFM-based measurement system still requires additional measuring range and complex configuration [26,27], which is not friendly to the on-machine surface profile measurement of a precision cutting tool Some technologies, such as force sensor integrated fast tool servo (FS-FTS) [28,29] and edge reversal methods [30], are employed for the cutting tool edge measurement, the application of these methods is quite limited. According to Equation (5), surface profile f (x) can be evaluated by the Z-directional displacement of the probe given by the positioning system
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