A comparison of physical properties of dielectric/metal/dielectric film on polyethylene terephthalate and optical glass substrates

Abstract

AbstractMolybdenum trioxide/indium/silver/indium/molybdenum trioxide layers were evaporated on the polyethylene terephthalate and glass substrates using thermal evaporation coating machine. In this study, we compare the electrical, optical, and topological properties of dielectric/metal/dielectric fabricated on the polyethylene terephthalate substrate and glass substrate. In this way, the influence of dielectric and metal thicknesses on the electroptical behavior and topological properties of the transparent conductive film are studied. Furthermore, the influence of the substrate temperature on the physical properties of prepared thin films is investigated. The results show that by increasing molybdenum trioxide film thickness, the sheet resistance increases. We find that the prepared thin films on the glass substrate has high optical transmittance with respect to its on the polyethylene terephthalate substrate. We also find that by increasing the substrate temperature, figure of merit decreases. It means that the maximum figure of merit is achieved at the room substrate temperature.