Abstract

A comprehensive comparison of npn and pnp profile design tradeoffs for SiGe HBTs is conducted using calibrated simulations. The parasitic energy band barrier induced by the SiGe/Si transition in the collector–base space charge region produces very different design constraints for pnp and npn transistors, and they must be optimized separately. A single SiGe profile is found to give acceptable performance for both npn and pnp devices, while still satisfying film stability constraints.

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