A comparison of gettering techniques for very large scale integration

Abstract

Two techniques developed for metal-oxide-semiconductor (MOS) processing, internal gettering (IG) and silicon gettering by segregation, are compared. The test vehicles are n+/p junction diodes and are tested for their reverse current and defect density. The forward characteristic of these diodes is ideal over about six orders of magnitude with slope 60 mV/decade. No generation-recombination current affects the characteristic. Some diodes, though with an ideal forward characteristic, behave for reverse bias as I=I0+V/R, where I0 is the current extrapolated at V=0 and R is an apparent resistance. Taking into account that the width of the depletion layer is of the order of 1–3 μm, the ‘‘resistivity’’ responsible for the ‘‘resistance’’ R is of the order of 1011–1014 Ω cm, depending on the particular diode. The parameters I0 and R are correlated over about four orders of magnitude by the relationship 1/R∝I0−Idiff, where Idiff is the diffusion current determined by the forward characteristic. The ‘‘resistance’’ R depends to a slight extent on the thermal history of the diode, but mainly on the final anneal temperature. Ideal diodes are particular diodes with I0=Idiff.