A comparative study of IR Ge photodiodes with a Schottky barrier contact and metal-semiconductor-metal structure

Abstract

We report the characterization of germanium (Ge) infrared photodiodes fabricated with a Schottky barrier contact and a interdigitated metal-semiconductor-metal (MSM) structure with gold electrodes on n-Ge substrates. The current-volage (I-V) characteristics were studied, and parameters such as the ideality factor and the barrier height of the Schottky contacts were extracted. Furthemore, we estimated the dark current and the photocurrent under illumination with λ = 1550 nm light, and we measured the capacitance-voltage (C-V) characteristics and the dependence of the responsivity on the bias voltage of both photodiodes at room temperature. The dark currents of the Schottky and the MSM photodiodes were ~ 20.2 μA and ~ 26.0 μA under −1 V bias and −2 V bias, respectively. In addition, the reverse breakdown voltage was high, in excess of ~ −30 V. The Schottky barrier height was deduced to be 0.546 eV. A maximum responsivity of 0.27 A/W was achieved under illumination with λ = 1550 nm light at a 2-V bias. A typical peak was observed at a wavelength of 1600 nm, and a high responsivity was observed in the wavelength range from 1200 to 1800 nm.