Abstract

This paper presents the experimental results of studying the samples of the electrochemical sensors of motion parameters on the base of Molecular Electronics Technology (MET). The sensors with microelectromechanical (MEMS) electrode assembly use electrolytes based on aqueous and non-aqueous solutions of potassium and lithium iodides. Electrolyte solutions contain impurities of ionic liquids and alcohols to achieve stable low-temperature operation and acceptable technical parameters of serial devices. The dependence of the general sensitivity and the shape of the amplitude-frequency characteristic on temperature have been studied. For the marginally acceptable samples, which had an acceptable temperature dependence of the conversion coefficient and low activation energies for the diffusion coefficient, the level of self-noise was found. The activation energy of the electrolyte diffusion coefficient was determined based on the analysis of the dependence of the background current on temperature. A conclusion was made regarding the possible prospects for using the studied solutions and components for operation in serial devices.

Highlights

  • This paper presents the experimental results of studying the samples of the electrochemical sensors of motion parameters on the base of Molecular Electronics Technology (MET)

  • The main technical progress in recent years was in the combination of the molecular–electronic principle of signal measuring with micro technologies for processing sensing elements

  • All the solutions were prepared on the basis of an organic or inorganic solvent with the obligatory addition of iodides and molecular iodine, so that the concentrations of the background electrolyte and the concentration of molecular iodine in the solutions were close to the traditional compositions of serial seismometers based on the principles of molecular electronics [36]

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Summary

Introduction

This paper presents the experimental results of studying the samples of the electrochemical sensors of motion parameters on the base of Molecular Electronics Technology (MET). Electrochemical sensors based on the principles of molecular electronics have successfully been used to record the seismic and acoustic effects of ultra-low amplitude [1,2] Devices of this type have high sensitivity, mechanical strength, and low sensitivity to inclinations. With the difference that a thin layer of parylene, was used as a substrate for the deposition of platinum layers instead of a silicon substrate, is described in [15] and, in general, has a similar disadvantage Another group of solutions, presented in [16–19], uses flat electrodes deposited on the surface of a silicon wafer containing holes made using electrochemical etching technology. Publisher’s Note: MDPI stays neutral with regard to jurisdictional claims in published maps and institutional affiliations

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