Abstract

A compact Bragg spectrometer with only one crystal has been built for use with synchrotron radiation of the storage ring BESSY. It is shown that this simple instrument can be used instead of a double crystal monochromator for applications like the transmittance measurement of materials which are relevant to X-ray lithography. Measurements were done on the stability of crystals for the longer wavelength region when exposed to synchrotron radiation.

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