A compact nano manipulator based on an atomic force microscope coupling with a scanning electron microscope or an inverted optical microscope

Abstract

In this paper, we describe a novel nano manipulator based on an atomic force microscope (AFM). The body of the manipulator is enough compact to be operated inside the sample chamber of a scanning electron microscope (SEM). In order to realize the compact body, we employed a self-detection type cantilever for AFM observation. The cantilever includes strain resistance element, which can easily detect a deflection signal of the cantilever without other sensing devices such as optical lever systems. It is possible to observe the manipulation situation in the real time observation by using the SEM. The AFM manipulator is coupled with a haptic device for human interface. Thus, by using this system, the operator can move the AFM probe at any position on the surface with feeling the interaction force detected by the cantilever on the sample surface according to the cantilever deflection. As a performance of the system, biological samples were controllably manipulated under the SEM observation. Furthermore, in order to deal with biological samples in liquid condition, the manipulator can be coupled with an inverted optical microscope. By using the system, we successfully demonstrated manipulation of biological samples in liquid condition. Two AFM manipulators could be used for dissection of biological samples like a knife and fork.