Abstract

In this work, we design and demonstrate a compact electron source that combines an integrated silicon nanotip photoemitter with a compact silicon-based electrostatic lens. The lens simultaneously accelerates electrons to 30 keV and focuses the resulting beam to a 0.4 μm (RMS) beam diameter with 62 pm-rad normalized emittance at a distance of 20 mm from the cathode. The compact nature of this lens provides a compelling source for dielectric laser accelerator (DLA) beamlines, ultrafast electron diffraction, or ultrafast electron microscopy. Driven by a 220 fs, 1960 nm pulsed laser beam, electron currents up to 28 electrons/pulse at 100 kHz are demonstrated. The electron bunch length is 540 ± 50 fs for photocurrents of <1 electron/pulse, increasing to 700 ± 80 fs for 28 electrons/pulse, as measured by cross correlation with a 220 fs pulsed laser beam. The maximum 5D peak brightness is measured to be 6.8 × 1013 A/(m2 rad2) at 28 electrons/pulse. These results represent a significant step toward developing practical benchtop-sized linear accelerators based on DLA technology or compact ultrafast electron microscopy and diffraction applications.

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