Abstract

An active beam stabilization system with high-precision correction and fast response with a small size is developed. By completely separating the correction of positional (x, y) and angular (α, β) deviations, this system avoids the coupling effect which increases the errors caused by the nonlinear, hysteresis, and creep characteristics of the piezoelectric actuators in conventional dual fast steering mirrors (FSMs) control system. And a combination of lenses is designed to achieve a large focal length in a small space, which is advantageous for high-precision and strong anti-interference ability. The experimental results show that the peak and valley (PV) values of the positional and angular deviations over 60 min are smaller than 0.58μm and 1.07 μrad which are less than 8% of the deviations without control, the standard deviation (STD) values are smaller than 0.07μm and 0.09 μrad. The regulating time is reduced to 38 ms. Moreover, the results from a series of experiments show that the STD values of the deviations over 10 h are smaller than 0.09μm and 0.13 μrad. Thus, the proposed system is effective for many laser applications, especially those involving high-precision optical systems.

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