Abstract
When a lithium-drifted silicon, Si(Li), energy dispersive X-ray detector is attached to a scanning electron microscope or a scanning transmission electron microscope, it becomes possible to perform an assay of the elemental composition of a localized region of a specimen. This capability has existed now for almost 20 years. During this time, the quality of the analytical results has slowly improved with the availability of better instrumentation and increased understanding of the physical basis of measurement and matrix effects. During the last few years, the pace in both instrumental development and theoretical understanding has picked up dramatically. What seemed like a maturing and ever more mundane field has now been reinvigorated. We will catalog here and comment on several of the developments which have occurred in x-ray detectors and in the hardware and software used to process the resulting x-ray signals into quantitative information.Although the Si(Li) x-ray spectrometer has dominated the field of x-ray microanalysis for many years, recent developments in intrinsic germanium (IG) detectors have produced spectrometers which, in several important characteristics, rival or exceed those of the Si(Li) spectrometer.
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