Abstract
In this paper, a CMOS readout circuit with frequency optimization for microphone sensor arrays is newly proposed. The proposed readout circuit is attractive due to that all the analog block circuits are robust and compact to be integrated. Based upon the device parameters of 0.35 μm 2P4M CMOS technology with 3 V power supply, all the functions and performance of the proposed analog front-end circuits for silicon condenser microphones are successfully proven through measurements. The area of the analog front-end circuits is 1142 × 1305 μm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> .
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