A CMOS Digitized Silicon Condenser Microphone for Acoustic Applications

Abstract

In this paper, a CMOS digitized silicon condenser microphone for acoustic applications is newly proposed. The proposed CMOS digitized silicon condenser microphone is attractive due to the fact that the sensor and all the circuits are robustly and compactly integrated. Another innovation of this proposed CMOS digitized silicon condenser microphone is that it could be operated without charge pump circuits. Thus, the sensor and circuits can be performed at the same power supply. Based upon 0.35 μ m 2P4M CMOS technology with 3 V power supply, measurement results have successfully verified the correct function and performance of the proposed CMOS digitized silicon condenser microphone. The area of the proposed CMOS digitized silicon condenser microphone is 1444 × 1383 μm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> and the FOM of the sigma-delta modulator is 163.85 dB. The proposed CMOS digitized silicon condenser microphone is suitable for mobile phones, laptops, PDAs, and hearing aids, etc.