A Closed-Loop Mode-Localized Accelerometer

Abstract

This paper reports a closed-loop mode-localized accelerometer for the first time. The accelerometer utilizes weakly coupled single-tine resonators as the sensing element to decrease the number of vibration modes. Based on a proposed closed-loop readout technique, the transient responses of the mode-localized accelerometer can be measured directly in the time domain. The test results show that the measured amplitude ratio noise and the resolution under closed-loop circumstances are $1.409 \times 10^{-5}/\surd $ Hz and $7.608~\mu \text{g}/\surd $ Hz, respectively, which are largely improved compared with those ( $9.883 \times 10^{-4}/\surd $ Hz and 0.744 mg/ $\surd $ Hz) under the open-loop measurement. The sensitivity based on the amplitude ratio readout is ~124 times higher than that of the frequency with the acceleration input of [−1g, +1g], which indicates that the high sensitivity of the mode-localized sensors can be also obtained utilizing closed-loop control. [2017–0148]