Abstract
A closed-cycle recirculating system is described which enables prolonged operation of a rare-gas halide excimer laser on a single charge of rare-gas mixture. The flowing gas is continuously purified in a high-temperature titanium gettering furnace, following removal of the halogen by reaction to form a volatile, but condensable, metal halide. The halogen is reintroduced after the rare-gas purification, being consumed in the operation of the laser along with the gettering metal.
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