Abstract
In this paper, using the charge-plasma concept, we propose an effective technique to implement a graded channel (GC) nanoscale MOSFET without the need for a separate implantation. The characteristics are demonstrated and compared with conventional dopingless, junctionless, and underlap inversion-mode MOSFET. The results show that the proposed GC device exhibits reduced drain-induced barrier lowering, improved intrinsic gain ( ${A} _{V}$ ), cutoff frequency ( ${f} _{T}$ ), and maximum oscillation frequency ( ${f} _{\mathrm{MAX}}$ ). Our approach overcomes the difficulty of creating a narrow GC doping profile and, thus, makes the GC MOSFET more attractive in carrying on with the scaling trend. The possible fabrication process flow of GC-double-gate (DG) FET is also proposed.
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