Abstract

A novel, solid-state sensor for charge detection in biomolecular processes is proposed. The device, called charge-modulated field-effect transistor, is compatible with a standard CMOS process, thus allowing fully electronic readout and large scale of integration of biosensors on a single chip. The detection mechanism is based on the field-effect modulation induced by electric charge changes related to the bioprocess. A model of the device was developed, to provide a manageable relationship between its output and geometric, design and process parameters. Extensive two- and three-dimensional simulations of the proposed structure validated the model and the working principle.

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