A charge compensation method for measuring passivated devices with high extraction voltage

Abstract

The testing of passivated integrated circuits with Electron-Beam Testers (EBT) is of great importance to design verification and failure analysis. Nevertheless it is still burdened with severe problems concerning accuracy of the measurement method. We present some results of extensive measurements on passivated devices providing a better picture of the spatial distribution of the measurable voltage contrast on passivated devices. As an outcome of these investigations a new technique for reducing measurement errors has been found which will be described in detail.