Abstract
A ceramic thick film humidity sensor, produced from MnZn ferrite, is presented. The proposed sensing mechanism is a combination of proton hopping, hydronium diffusion, and vacancy donor traps releasing electrons into the conduction band. The sensor structure comprises a two-layer device; the first layer is an interdigitated conductor and the second layer is a 30μm thick sensing layer. The effects of sintering the sensing pastes in air and vacuum have been reported. The air-fired sample exhibits the highest humidity sensitivity (1.54%/RH%) and the lowest temperature sensitivity (0.37%/oC). The vacuum-fired sample has the lowest humidity sensitivity (0.043%/RH) and the highest temperature sensitivity (0.77%/oC). The sensitivity results indicate that the air-fired sample has the best potential for use in humidity sensing applications.
Highlights
Humidity is a constant environmental factor affecting many industries and technologies [1].it is important to be able to accurately monitor the correct levels of humidity in the atmosphere
There are three groups of materials used as humidity sensors: electrolytes, organic polymers and ceramics [1]
Commercially developed humidity sensors are mainly made of polymer films and ceramics [2]
Summary
Microelectronics and Semiconductor Research Group, ECE Department, National Technological Park, University of Limerick, Limerick, Ireland. Received: 6 February 2002 / Accepted: 8 February 2002 / Published: 22 February 2002
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