Abstract
In phase measuring deflectometry (PMD), a camera observes a sinusoidal fringe pattern via the surface of a specular object under test. Any slope variations of the surface lead to distortions of the observed pattern. Without height-angle ambiguity, carrier removal process is adopted to evaluate the variation of surface slope from phase distribution when a quasi-plane is measured. However, in the usual measurement system, the carrier phase will be nonlinear due to the restrictions of system geometries. In this paper, based on the analytical carrier phase description in PMD, a carrier removal method is proposed to remove the nonlinear carrier phase. Both the theoretical analysis and the experiment results are presented. By comparison with reference-subtraction method and series-expansion method, this proposed method can achieve carrier removal process with only the measurement of one single object, as well as high accuracy and time-saving.
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