A Carbon-Nanotube Resistive Respiratory Sensor by using Dielectrophoresis Technique

Abstract

This work presents a resistive respiratory sensor realized by forming a cluster of carbon nanotubes (CNT) on two plane electrodes using dielectrophoresis (DEP) technique. As respiratory gas flows across the multi-walled CNT (MWCNT) cluster, vapor molecules condensing on the junctions between neighboring MWCNTs give rise to the variation of the resistance of the MWCNT cluster. Preliminary measured results show that the proposed sensor has excellent sensitivity and rapid response with high signal to noise ratio.